Mikrofabrikáció

Mikrofabrikáció refers to the process of creating microscopic structures and devices. It is a broad term encompassing various techniques used to fabricate objects with dimensions typically in the micrometer range, though it can also extend to nanometer scales. This field is fundamental to the production of microelectronic components, sensors, micro-mechanical systems (MEMS), and microfluidic devices.

The core principles of mikrofabrikation often involve lithography, a process used to transfer a geometric pattern from a mask to a light-sensitive chemical called a photoresist, or to other materials. Following lithography, etching processes are employed to selectively remove material, shaping the underlying substrate according to the patterned resist. Deposition techniques are also crucial, allowing for the addition of thin films of various materials, such as metals or insulators, onto the substrate.

Common methods within mikrofabrikation include photolithography, electron-beam lithography, and X-ray lithography for patterning, alongside dry etching (like plasma etching) and wet etching for material removal. Deposition methods include physical vapor deposition (PVD) and chemical vapor deposition (CVD). The fabrication of microdevices often involves multiple steps, carefully orchestrated to build complex three-dimensional structures layer by layer. This intricate manufacturing process enables the creation of the miniaturized technologies that are integral to modern electronics, medicine, and scientific research.