microsupercapacitor

A microsupercapacitor is a miniaturized energy storage device designed to provide high power density for micro-scale electronics and on-chip systems. It combines features of supercapacitors and microfabricated components to deliver rapid charge and discharge cycles in a compact package. Energy storage arises primarily from electric double-layer capacitance, with some designs incorporating pseudocapacitance from metal oxides or conducting polymers to boost capacity.

Most microsupercapacitors use planar architectures based on interdigitated electrodes, which are compatible with microfabrication techniques. Electrode materials are typically carbon-based (such as activated carbon, graphene, or carbon nanotubes), with alternatives including metal oxides or conducting polymers. Electrolytes span aqueous, organic, and ionic liquid formulations, chosen to balance voltage window, safety, and compatibility with microelectronic processes. In some devices, solid or gel electrolytes enable better packaging and integration with sensors and circuits.

Fabrication methods vary from conventional thin-film microfabrication (lithography, deposition, and etching) to printed approaches (screen printing, inkjet printing, or electrochemical deposition). These methods aim to achieve high interfacial area, good conformal coverage, and compatibility with complementary metal-oxide-semiconductor (CMOS) processes. Performance is described by areal or volumetric capacitance, energy density, and power density, along with cycle life and impedance characteristics. Microsupercapacitors typically offer very high power density and long cycle life but lower energy density than lithium-based batteries, reflecting their design emphasis on rapid recharge and short-term energy buffering.

Applications include on-chip power for MEMS and sensors, peak-power support for micro-actuators, portable and wearable devices, and systems requiring fast energy delivery. Ongoing developments focus on advanced materials, solid-state and flexible implementations, and integration with broader energy management architectures.