micromecânico
Micromecânico is a term that refers to the field of micro-electromechanical systems, often abbreviated as MEMS. It involves the integration of mechanical elements, sensors, actuators, and electronics onto a common silicon substrate through microfabrication technology. These devices operate on a microscopic scale, typically with dimensions ranging from a few micrometers to a few millimeters.
The development of micromecânico devices has opened up a wide range of applications. In the consumer electronics
The fabrication process for micromecânico devices draws heavily from semiconductor manufacturing techniques. Photolithography is used to