microengines
Microengines are miniature devices that convert energy into mechanical work at scales ranging from tens of micrometers to a few millimeters. The category includes micro internal combustion engines, microturbines, and a variety of chemically or electrically powered actuators used in micro-robotics, microfluidics, and MEMS. In many cases, the term also covers catalytic microengines and other self-propelled systems that generate motion from chemical energy.
At small scales, surface forces, friction, and heat transfer dominate dynamics, so performance does not simply
Common implementations include micro internal combustion engines and microturbines demonstrated in laboratory settings; electrostatic comb-drive and
Fabrication typically relies on MEMS technologies, including lithography, thin-film deposition, etching, and assembly of microstructures from
Applications focus on micro-robotics, targeted drug delivery, lab-on-a-chip systems, and precise micropositioning. While there have been