microbattery

A microbattery is a compact energy storage device designed to power microelectronic systems such as sensors, MEMS, and implantable devices. Typically ranging from a few millimeters to a few centimeters in their largest dimension, microbatteries are designed to be integrated directly onto a chip or packaged with a small device to provide local energy storage and reduce reliance on larger, conventional batteries.

Most microbatteries use lithium-based chemistries or solid-state thin-film designs. Common configurations include thin-film lithium-ion microbatteries and solid-state microbatteries with ceramic or polymer electrolytes. Other explored chemistries include zinc-based formulations. Architectures can be planar, stacked, or three-dimensionally integrated to maximize energy density within a limited footprint.

Fabrication relies on microfabrication techniques such as lithography, sputtering, electrodeposition, and chemical vapor deposition. Encapsulation and packaging are critical to protect sensitive components from moisture and mechanical damage while enabling electrical connection to the host device. Key performance metrics include energy density, power density, cycle life, operating temperature range, and self-discharge.

Applications span RFID tags, medical implants, environmental and industrial sensors, memory for autonomous microsystems, and micro-robotics. Compared with conventional batteries, microbatteries offer attractive form-factor advantages but lower total energy; research aims to improve safety, reliability, and energy density through solid electrolytes, advanced electrode materials, 3D microarchitectures, and integration with energy harvesting.