ionimpact
Ionimpact refers to the physical event in which an energetic ion collides with a solid target. The interaction can lead to elastic scattering, electronic excitation, ionization, sputtering of surface material, and the implantation of the incoming ion within the substrate. The particular outcome depends on the ion’s mass and charge, its kinetic energy, the incidence angle, and the target’s composition, crystallography, and surface condition. At low to moderate energies, sputtering and implantation are common; at higher energies, deeper penetration and track formation may occur, with electronic stopping influencing energy loss in different regimes.
Ion impact is a central concept in ion beam analysis and materials science. Techniques such as Rutherford
Applications span semiconductor fabrication (ion implantation for dopant introduction), surface modification and alloying, thin-film growth, and
In documentation and discourse, ion impact is usually written as two words; the concatenated form ionimpact