Mikrolithographie

Mikrolithographie, also known as microlithography, is a process used in the fabrication of integrated circuits and other micro-devices. It involves the creation of very fine patterns on a substrate, typically a silicon wafer, using a photolithographic technique. The process begins with the deposition of a light-sensitive material, called a photoresist, onto the substrate. A mask, which contains the desired pattern, is then placed over the photoresist. The mask is illuminated with ultraviolet light, which causes the photoresist to undergo a chemical change in the exposed areas. The unexposed areas of the photoresist are then removed, either through a chemical process (development) or by physical means (etching). This leaves behind the desired pattern on the substrate. The process can be repeated multiple times to create complex, multi-layered structures. Mikrolithographie is a critical step in the production of modern electronic devices, enabling the creation of features as small as a few nanometers. The technique has evolved over the years, with advancements in photoresist materials, mask technology, and exposure tools, leading to increased precision and efficiency in the fabrication process.