MEMSkomponenttien
MEMSkomponenttien, which translates to MEMS components in English, refers to the micro-electromechanical systems components. These are tiny devices fabricated using micro-fabrication techniques, similar to those used for integrated circuits. MEMS components integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology. This allows for the creation of devices that can sense their environment and interact with it.
The miniaturization of mechanical and electrical systems is a key characteristic of MEMS components. They can
MEMS technology offers significant advantages such as reduced size and weight, lower power consumption, mass production