HeißfilamentTechniken
HeißfilamentTechniken, often translated as Hot Filament Techniques, refers to a group of methods used to deposit thin films or nanostructures by heating a filament in the presence of precursor gases. The high temperature of the filament leads to the decomposition of these precursor gases, generating reactive species. These species then diffuse and react on a substrate surface, ultimately forming a solid deposit.
A common application of HeißfilamentTechniken is in Chemical Vapor Deposition (CVD) processes. In this context, the
This technique offers advantages such as controlled deposition rates and the ability to create complex nanostructures.