CVDmenetelmissä
CVDmenetelmissä, often translated as CVD methods or chemical vapor deposition methods, refers to a class of processes used in materials science and engineering to produce high-quality, solid materials, typically in the form of thin films or coatings. These techniques involve exposing a substrate to one or more volatile precursor chemicals, which then react and/or decompose on the substrate surface to deposit the desired solid material. The process occurs in a vacuum chamber or a heated reaction chamber.
The key advantage of CVD methods lies in their ability to deposit materials with high purity, precise
Common applications of CVD methods include the fabrication of semiconductors, optical coatings, protective layers on tools