AlNnnitridekerrokset
AlNnnitridekerrokset is a proprietary class of ultrathin, multilayered coatings that integrate aluminum nitride (AlN) with engineered nitrogen‑rich interlayers. The term combines the chemical designation “AlN” with the Finnish suffix “-kerrokset,” meaning “layers,” to highlight its stratified architecture. These coatings are typically fabricated through atomic‑layer deposition (ALD) or plasma‑enhanced chemical vapor deposition (PECVD), producing thicknesses in the range of 50–200 nm for each sub‑layer. The nitrogen‑rich interlayers—inclusive of nitrogen functionalities such as N₂, N₂⁻, and N₃⁻—improve adhesion to underlying substrates and enhance resistance to high‑temperature oxidation.
In terms of physical characteristics, AlNnnitridekerrokset exhibits exceptional hardness (measured in the 25–35 GPa range), low coefficient
Challenges remain in scaling the deposition process for large‑area substrates and ensuring consistent interlayer composition across