silicomethoden

Silicomethoden is a term used in materials science and semiconductor technology to describe methods and techniques related to silicon (Si) and silicon-based materials. The scope includes production and purification of silicon, processing of silicon wafers, device fabrication, and the characterization of silicon structures. While the emphasis is often on electronics, silicon methods also underpin photovoltaics, MEMS, and silicon-based coatings.

Production and processing cover the journey from raw silica to high-purity silicon used in devices. Silicon is produced commercially by carbothermic reduction of quartz to metallurgical-grade silicon, followed by purification to polysilicon for electronics through processes such as the Siemens process or chloride-based purification. Monocrystalline silicon is grown by crystal growth techniques such as the Czochralski (CZ) or floating-zone (FZ) methods, after which wafers are sliced, cleaned, and prepared for device fabrication.

Device fabrication and processing involve steps to create electronic components on silicon wafers. Key steps include oxidation to form silicon dioxide, diffusion or ion implantation to introduce dopants, and annealing to activate dopants. Silicon thin films are deposited by chemical vapor deposition (CVD) or physical vapor deposition (PVD), including amorphous silicon (a-Si) and hydrogenated amorphous silicon (a-Si:H). Patterning uses photolithography and etching (plasma or chemical), followed by metallization for contacts. Advanced CMOS processes optimize dopant profiles, defect densities, and interface properties through precise processing controls.

Analytical methods and safety are central to silicomethoden. Characterization techniques include Raman spectroscopy, X-ray diffraction, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and secondary-ion mass spectrometry for dopant profiling. Safety considerations address silica dust hazards and the handling of silicon precursors such as silane, which require strict controls in industrial settings. See also: silicon, semiconductor fabrication, photolithography.