photoresistant
Photoresistant refers to a material that changes its chemical or physical properties when exposed to light, particularly ultraviolet (UV) light. This change in properties is reversible or irreversible depending on the specific material and its application. The phenomenon is fundamental to photolithography, a process used extensively in the manufacturing of semiconductor devices and microelectronic circuits. In photolithography, a photoresistant coating is applied to a substrate, typically silicon. A mask, containing the desired circuit pattern, is then placed over the photoresistant. Light is shone through the mask, exposing specific areas of the photoresistant. The exposed areas undergo a chemical change. For positive photoresist, the exposed areas become soluble in a developer solution, while the unexposed areas remain insoluble. For negative photoresist, the opposite occurs; the exposed areas become insoluble and harden, while the unexposed areas are washed away. This selective removal of the photoresistant creates a stencil pattern on the substrate, which can then be used for subsequent etching or deposition steps. Photoresist materials are crucial for creating intricate patterns at microscopic scales, enabling the miniaturization and complexity of modern electronic components.