mikrolitográfiában
Mikrolitográfia, also known as microlithography, is a process used in the fabrication of microelectronic circuits and other micro-scale devices. It involves the transfer of a geometric pattern from a mask to a light-sensitive chemical called a photoresist, typically on a substrate such as a silicon wafer. This patterned photoresist then acts as a mask for subsequent processing steps like etching or deposition.
The most common form of microlithography is photolithography, which uses light, usually ultraviolet (UV) light, to
After exposure, the photoresist is developed, removing either the exposed or unexposed areas, depending on whether
Advancements in microlithography have been crucial for the continuous miniaturization of electronic components, following Moore's Law.