microoptoelectromechanical
Microoptoelectromechanical systems (MOEMS) are a class of devices that integrate optical, electrical, and mechanical components on a single chip. These systems are typically fabricated using microfabrication techniques, which allow for the creation of small-scale structures with high precision. MOEMS devices are used in a variety of applications, including telecommunications, sensing, and imaging.
One of the key advantages of MOEMS is their ability to combine optical and electronic functions on
MOEMS devices are typically fabricated using a combination of lithography, etching, and other microfabrication techniques. These
In recent years, there has been significant research and development in the field of MOEMS, driven by