lämpöoksidaation
Lämpöoksidaatio, known in English as thermal oxidation, is a chemical process that involves the reaction of a substance with oxygen at elevated temperatures. This process leads to the oxidation of the material, often resulting in the formation of oxides. The rate of thermal oxidation is highly dependent on the temperature, the partial pressure of oxygen, and the specific material being oxidized.
In materials science, thermal oxidation is a critical process for modifying the surface properties of various
Beyond semiconductors, thermal oxidation plays a role in other fields. For instance, it is a common method