kaasujäännöstetutkimuksissa

Kaasujäännöstetutkimuksissa, often translated as residual gas analysis (RGA) in English, refers to the process of identifying and quantifying trace amounts of gases present in a vacuum system or environment. This technique is crucial for understanding the composition of residual gases, which can originate from outgassing of materials, leaks, or process-related reactions.

The primary tool for performing RGA is a mass spectrometer, typically a quadrupole mass spectrometer. This device separates ions based on their mass-to-charge ratio. A small sample of the gas within the vacuum chamber is ionized, and these ions are then accelerated through an electric field. Only ions with the correct mass-to-charge ratio will pass through the quadrupole filter to be detected. By scanning through a range of mass-to-charge ratios, the RGA can identify the different gas species present and their relative abundances.

The applications of residual gas analysis are widespread. In semiconductor manufacturing, RGA is used to monitor process gases and detect contaminants that could affect wafer quality. In scientific research, it helps characterize vacuum systems for particle accelerators, telescopes, and fusion experiments. It is also employed in leak detection, where a sudden increase in a specific gas signature can indicate a breach in the vacuum integrity. Furthermore, RGA plays a role in space simulation and material outgassing studies, providing insights into the behavior of materials in vacuum environments. Understanding the residual gas composition is vital for maintaining system performance, ensuring product purity, and troubleshooting vacuum-related issues.