Vakuumkamre

Vakuumkamre (vacuum chambers) are sealed enclosures from which air and other gases are evacuated to create a low-pressure environment. By removing gases, these chambers reduce oxidation, contamination, and convection, enabling precise control of experiments and processes and the simulation of space or other rarefied environments.

Construction and operation: Most chambers are made of stainless steel or glass, with electrical feedthroughs and viewports. They use seals suitable for vacuum, such as metal gaskets, to minimize leaks. The interior surfaces are chosen for low outgassing. Pump systems usually combine a roughing pump (such as a rotary vane pump) with a high-vacuum pump (turbomolecular, diffusion, or ion pump) to reach high or ultrahigh vacuum. Vacuum levels range from rough vacuum to ultrahigh vacuum, with outgassing and leaks being the main limiting factors. Vacuum gauges and residual gas analyzers monitor pressure and composition.

Applications: Vacuum chambers are used in research and industry for materials science, surface science, spectroscopy, and microscopy, as well as in semiconductor manufacturing, thin-film deposition, and plasma processing. They enable controlled deposition, etching, or reaction in a gas-free or defined-gas environment. Space-simulation chambers reproduce the vacuum and thermal conditions of outer space.

Operation and safety: Chambers require careful handling to prevent leaks and implosion risks; PPE and interlocks may be used. Helium leak testing and residual gas analysis help detect leaks and contaminants. Regular bake-out and conditioning reduce outgassing.

Vakuumkamre are essential wherever control of pressure, gas composition, or contamination is crucial, spanning research laboratories to industrial production.