SiOCH
SiOCH refers to a class of materials that are a hybrid of silicon, oxygen, and carbon. These materials are typically amorphous solids with a disordered structure, unlike crystalline silicon dioxide (silica) or silicon carbide. The specific properties of SiOCH materials depend on the relative proportions of silicon, oxygen, and carbon, as well as the bonding arrangements within the material.
SiOCH materials are often synthesized using chemical vapor deposition (CVD) techniques, particularly plasma-enhanced CVD (PECVD). Precursor
A key characteristic of SiOCH materials is their tunable dielectric constant. By incorporating carbon, which has