SiHCl
SiHCl, also known as silane hydrogen chloride, is a chemical compound with the formula SiHCl3. It is a colorless gas at room temperature and is a member of the silane family, which consists of compounds with the general formula SiHnX4-n, where X can be hydrogen, chlorine, or other halogens. SiHCl3 is a valuable precursor in the synthesis of silicon-based materials and is used in the semiconductor industry for the deposition of silicon films.
The compound is typically prepared by the reaction of silicon tetrachloride (SiCl4) with hydrogen (H2) in the
SiHCl3 is highly reactive and can undergo various chemical transformations. It can react with water to form
Due to its reactivity and the potential hazards associated with handling chlorine-containing compounds, SiHCl3 should be
In summary, SiHCl3 is a significant compound in the field of silicon chemistry, with applications in the