SiH3CH3
SiH3CH3, also known as trimethylsilane or methylsilane, is a chemical compound with the formula SiH3CH3. It is an organosilicon compound, meaning it contains silicon-carbon bonds. In this molecule, a silicon atom is bonded to three hydrogen atoms and one methyl group (CH3). The silicon atom has a tetrahedral geometry, similar to carbon in methane.
Trimethylsilane is a colorless gas at room temperature and pressure. It is flammable and can react with
This compound has found some applications as a precursor in the deposition of silicon-containing thin films