Augerspektroszkópia

Augerspektroszkópia, also known as Auger Electron Spectroscopy (AES), is a surface-sensitive analytical technique used to determine the elemental composition of a sample. It works by bombarding the sample surface with a focused beam of electrons. This electron beam causes the emission of Auger electrons from the atoms in the top few atomic layers of the material. These Auger electrons have characteristic kinetic energies that are unique to each element. By measuring the energy distribution of these emitted electrons, a spectrum can be generated, revealing the presence and relative abundance of different elements on the surface. The technique is highly surface-sensitive, with an information depth typically in the range of 2-10 nanometers, making it ideal for studying thin films, surfaces, and interfaces. AES can detect elements from lithium to uranium, although its sensitivity varies depending on the element. It is a qualitative and quantitative technique, meaning it can identify elements present and also determine their concentrations. Common applications include materials science, semiconductor analysis, failure analysis, and studies of corrosion and oxidation. The technique is performed under ultra-high vacuum (UHV) conditions to prevent contamination of the sample surface and ensure the free escape of Auger electrons.