trisilicide
Trisilicide is a compound of silicon and another element, typically a metal, with the general formula MSi3, where M represents the metal. These compounds are known for their high melting points and are often used in semiconductor technology. The most well-known trisilicide is titanium trisilicide (TiSi3), which is used as a gate material in metal-oxide-semiconductor (MOS) devices due to its low resistivity and compatibility with silicon.
Trisilicides are typically formed through solid-state reactions between silicon and the metal at high temperatures. The
Trisilicides are also used in other applications, such as in the production of silicon-based alloys and as
In summary, trisilicides are a class of compounds that combine silicon with a metal, typically forming at