sputteringlike
Sputteringlike is a term used to describe a phenomenon that resembles or mimics the physical process of sputtering, but without the direct involvement of plasma. Sputtering itself is a process where energetic ions bombard a target material, causing atoms or molecules to be ejected from the surface. This ejected material is then deposited onto a substrate, often used for thin-film deposition.
In a "sputteringlike" process, similar atom or molecule ejection and deposition can occur through other mechanisms.
These sputteringlike methods can be advantageous in specific applications where plasma damage to sensitive substrates needs