röntgenreflektometri
Röntgenreflektometri, often abbreviated as XRR, is a non-destructive technique used to analyze thin films and layered structures. It exploits the phenomenon of X-ray reflection at grazing incidence angles. When X-rays strike a smooth surface or interface between two materials with different refractive indices, they can be reflected. The angle of incidence and the wavelength of the X-rays are crucial parameters in this process.
In XRR, the sample is illuminated with X-rays at very small angles, typically below 5 degrees. As
Beyond thickness, XRR can also provide information about the density and roughness of the thin film. The