Vakuumventile

Vakuumventile are mechanical devices used to control the flow of gases within vacuum systems, from rough to ultra-high vacuum. They provide isolation between components, enable controlled venting, and coordinate the operation of pumps, gauges, and experimental chambers. A valve's performance is defined by its leak rate, outgassing, material compatibility with bake-out, and reliability under repeated cycling.

Common valve types include isolation valves (gate, globe, ball) to stop flow; throttle or metering valves for precise control; diaphragm and pinch valves for clean shutoff; check valves for backflow; and vent valves for controlled chamber venting. In ultra-high vacuum, metal-sealed valves with knife-edge or bellows seals and CF or ISO flanges achieve the lowest leak rates.

Construction emphasizes vacuum compatibility. Stainless steel (304/316) is standard; elastomer seals are used only in lower vacuums due to outgassing, whereas metal seals (copper, nickel) and bakeable designs predominate in UHV facilities.

Valves are actuated manually, pneumatically, or electrically and may include position indicators and interlocks. Choice depends on vacuum level, throughput, chemical compatibility, and bake-out needs.

Applications include semiconductor fabrication, surface science, cryogenics, and laboratory research where reliable isolation, controlled venting, and contamination control are essential. Leak rates are specified in mbar·L/s, with high-quality UHV valves typically below 1×10^-9 mbar·L/s.