Vakuumsystems
Vakuumsystems are engineered installations that create and sustain a vacuum in a sealed chamber by removing gas molecules. They enable processes and measurements that require reduced pressure, such as thin-film deposition, spectroscopy, and electron microscopy. Vacuum quality is described by pressure (pascal, millibar, or torr) and by base pressure. Common ranges are rough vacuum (>1 mbar), high vacuum (10^-3 to 1 mbar), and ultra-high vacuum (<10^-7 to 10^-9 mbar).
A typical system includes a chamber, pumps, seals, valves, gas-handling components, and gauges. Seals are elastomeric
Performance depends on pumping speed, conductance, and outgassing. Bake-out and material choice reduce outgassing; leak detection
Applications include semiconductor fabrication, physical and chemical vapor deposition, surface science, mass spectrometry, and microscopy. Industrial
Maintenance involves regular leak checks, seal and filter replacement, and monitoring pump oil or using oil-free