SiH3Cl
SiH3Cl, commonly referred to as chlorosilane, is a silicon-containing compound with the formula SiH3Cl. It belongs to the family of chlorosilanes, formed by substituting a single hydrogen in silane (SiH4) with chlorine. The compound is a colorless and highly reactive substance that is volatile at room temperature and is typically handled under dry, inert conditions.
Physical and chemical properties: SiH3Cl is moisture sensitive and reacts readily with water and oxygen. In
Production and handling: SiH3Cl is usually prepared by controlled chlorination of silane derivatives or through the
Applications: In industry, SiH3Cl serves as a silicon-containing precursor for chemical vapor deposition and the synthesis
Safety: SiH3Cl is corrosive and reacts with water to form HCl and silica. It should be handled