Hochvakuumstufen
Hochvakuumstufen, often translated as high vacuum stages, are essential components in creating and maintaining very low pressure environments. These stages are typically employed in multi-stage vacuum systems where progressively lower pressures are required. Each stage is designed to remove a specific range of gas molecules, contributing to the overall efficiency of the vacuum pump. The initial stages often handle larger gas loads at relatively higher pressures, utilizing pumps like rotary vane pumps. Subsequent stages then take over at progressively lower pressures, employing technologies such as turbomolecular pumps or diffusion pumps. The design of each stage is optimized for the pressure regime it operates within, ensuring effective gas removal and minimizing the load on the following stages. The effective separation and removal of different gas species are crucial for achieving the desired high vacuum levels, which are critical in numerous scientific and industrial applications, including semiconductor manufacturing, particle accelerators, and material coating processes.