massflowcontrolled
Massflowcontrolled refers to devices and methods that regulate the mass flow rate of a fluid, typically a gas, in a process. The most common implementation is a mass flow controller (MFC), an integrated unit comprising a flow sensor, a valve or actuator, and control electronics that maintain a user-set mass flow rate, largely independent of inlet pressure and temperature within specified ranges.
Most MFCs use a thermal mass flow sensor: a heated element's temperature rise or cooling effect is
Applications include semiconductor fabrication, chemical vapor deposition, plasma processing, analytical instrumentation, and laboratory gas delivery systems.