induktiovakuuntajat
Induktiovakuuntajat, also known as inductive vacuum gauges, are instruments used to measure low pressures within a vacuum system. They operate on the principle of electromagnetic induction. The core component of an induktiovakuuntaja is a coil, which generates a magnetic field. As the gas pressure inside the vacuum chamber decreases, the number of gas molecules available to interact with the magnetic field also decreases. This interaction, typically involving ionization of the gas, affects the impedance of the coil. The induktiovakuuntaja measures the change in coil impedance, which is then correlated to the pressure of the gas. These gauges are suitable for measuring pressures in the medium to high vacuum range, typically from 10^-2 to 10^-7 mbar. They are known for their robustness and ability to withstand harsh environments, making them useful in industrial applications such as semiconductor manufacturing, thin-film deposition, and vacuum furnace operation. Unlike some other vacuum gauge types, they do not require a separate reference vacuum. Calibration is usually performed by relating the measured impedance to known pressure points.