XeF2

Xenon difluoride (XeF2) is an inorganic compound and one of the more stable xenon fluorides. It is a colorless crystalline solid at room temperature and sublimes when heated. In the gas phase, the molecule is linear (F–Xe–F) with three lone pairs on xenon, giving the observed linear geometry.

Preparation and handling: XeF2 is typically prepared by fluorinating xenon-containing precursors with fluorine in carefully controlled conditions, and purified by vacuum sublimation. It is highly reactive toward moisture and air and is usually stored under dry, inert atmosphere.

Reactivity and applications: As a strong electrophilic fluorinating agent, XeF2 transfers fluorine to a broad range of substrates under mild conditions, enabling synthesis of alkyl and aryl fluorides and other fluorinated organics. It also serves as a fluoride source in inorganic synthesis, and is widely used as a dry etchant for silicon in microfabrication and MEMS processes due to its volatility and compatibility with many materials.

Safety: XeF2 is toxic and corrosive; it reacts with water to form hydrofluoric acid and xenon gas. It should be handled in a fume hood with appropriate PPE and stored away from moisture.