Scatterometri

Scatterometri is a technique used to analyze the scattering of light or other electromagnetic radiation from a sample. It involves measuring the intensity of scattered light as a function of the scattering angle. By observing these scattering patterns, researchers can infer information about the size, shape, and internal structure of the particles or molecules within the sample. This method is particularly useful for studying colloids, aerosols, biological tissues, and other complex materials where direct imaging might be difficult or impossible. The underlying principle relies on the interaction of incident radiation with the sample, causing the radiation to be deflected in various directions. The intensity distribution of this deflected radiation provides a unique fingerprint of the scattering object. Different scattering regimes, such as Rayleigh scattering (for particles much smaller than the wavelength of light) and Mie scattering (for particles comparable in size to the wavelength), are analyzed using distinct theoretical frameworks. Instrumentation for scatterometry typically includes a light source, a goniometer to control the scattering angle, and a detector to measure the scattered intensity. Applications range from quality control in manufacturing to fundamental scientific research.