CVDtekniikoihin
CVDtekniikoihin refers to Chemical Vapor Deposition techniques. These are a group of processes used to deposit thin films or coatings onto a substrate. The core principle involves exposing the substrate to volatile precursors, which then react or decompose on the substrate surface to form the desired solid material. This deposition method is versatile and widely employed in various industries, particularly in semiconductor manufacturing and materials science.
The process typically takes place within a vacuum chamber or a controlled atmosphere. Gaseous precursors are
There are several variations of CVD, each suited for different applications. Plasma-enhanced CVD (PECVD) uses a