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UVLaser

UVLaser refers to lasers that emit ultraviolet radiation, typically in the 100 to 400 nanometer range. The short wavelengths provide high photon energy, enabling precise ablation, rapid photochemical effects, and high-resolution material processing. UV lasers come from several families, each with distinct advantages and limitations.

Common technologies include excimer lasers, which use short-lived dimer molecules such as argon fluoride (ArF, 193

Applications are diverse. In semiconductor manufacturing, UV lasers have been central to photolithography and microlithography, enabling

Safety and practical considerations are prominent. UV radiation can cause eye and skin damage, and many UV

nm),
krypton
fluoride
(KrF,
248
nm),
and
xenon
chloride
(XeCl,
308
nm).
These
lasers
are
typically
pulsed
and
deliver
high-energy
UV
pulses
suitable
for
fine
surface
modification
and
micromachining.
Solid-state
sources
generate
UV
light
through
nonlinear
frequency
conversion
of
visible
or
near-IR
lasers,
producing
wavelengths
such
as
266
nm
(fourth
harmonic
of
Nd:YAG
at
1064
nm)
and
355
nm
(third
harmonic).
Rare
deep-UV
systems,
such
as
fluorine-based
F2
lasers
at
around
157
nm,
have
specialized
uses
in
research
and
lithography
but
require
complex
optics
and
gas
handling.
pattern
transfer
at
small
feature
sizes.
In
medicine,
excimer
lasers
at
193
nm
are
used
for
corneal
refractive
surgery
(LASIK
and
related
procedures).
UV
lasers
also
support
micromachining,
optical
data
storage,
spectroscopy,
and
photochemistry,
where
deep-UV
photons
drive
photochemical
reactions
and
high-precision
material
removal.
systems
rely
on
gas
mixtures
or
specialized
optics
that
degrade
under
UV
exposure.
Shielded
enclosures,
appropriate
eyewear,
and
careful
handling
of
gases
and
high
voltages
are
required.
The
optics
and
materials
for
UV
systems
are
often
more
sensitive
to
damage
and
aging
than
those
for
visible
or
IR
lasers,
contributing
to
higher
maintenance
and
operating
costs.